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| Production Process Released Advanced Passives & MESFET Foundry Service GaAs MESFET Foundry Service Passivation Via TQTRp TQTRX Features * Metal 3 Metal 3 - 5 um Metal 2 Dielectric Metal 2 - 2 um * * Metal 1 Dielectric Metal 1 Metal 1 - 2 um Dielectric MIM Metal NiCr Metal 0 N+ N+ Isolation Implant N-/P- Channel E,D,G MESFET MIM Capacitor NiCr Resistor Semi-Insulating GaAs Substrate * * * * * * * * TQTRX Process Cross-Section TQTRp Process Cross-Section High Density Interconnects: * 3 Global * 1 Local * 9 m Total Thickness High-Q Passives; >50 @ 2 GHz 0.6 m Gate Length MESFET Optional: Power & General Purpose D-FETs; E-FET Schottky-Barrier Diodes Bulk & Thin Film Resistors High Value Capacitors Dielectric Encapsulated Metals Planarized Surface; simplified plastic packaging Substrate Vias Available Volume Production Processes Low Cost Passives-Only Option General Description TriQuint's TQTRp process has advanced metal systems and MESFET devices. It is targeted at high performance, small size passive-only or passive/active circuits and utilizes over 9 m of gold metal. High density interconnections are accomplished with three thick global and one surface metal interconnect layers. The four metal layers are encapsulated in a high performance dielectric that allows wiring flexibility and plastic packaging simplicity. Precision NiCr resistors, implanted resistors, and high value MIM capacitors are included. Advanced 0.6 m enhancement/depletion mode MESFET devices include an integrated power MESFET, general purpose D-Mode MESFET, and Enhancement Mode MESFET and are based on the TQTRX process, currently TriQuint's highest volume process. The TQTRp process is available on 150-mm (6 inch) wafers. Applications * * * * * Active and/or Passive Components Circuits Requiring High Q Passive Elements Ideal for Mixers, Converters, and Phase-Shifters with Baluns, Transformers, E-M Structures Mobile Phone Front End Blocks RF Module Front-Ends TriQuint Semiconductor TriQuint Semiconductor 2300 NE Brookwood Pkwy 2300 NE Brookwood Pkwy Hillsboro, Oregon 97124 Hillsboro, Oregon 97124 Semiconductors for Communications www.triquint.com Page 1 of 7; Rev 1.0 11/15/01 Page 1 of 6; Rev 2.1 8/10/02 Phone: 503-615-9000 Phone: 503-615-9000 Fax: 503-615-8905 Fax: 503-615-8905 Email: info@triquint.com Email: info@triquint.com Production Process Released Advanced Passives & MESFET Foundry Service MESFET Foundry Service TQTRp Process Details Element Interconnects MIM Caps Resistors TQTRp TQTRX Units um pF/mm2 Ohms/sq Ohms/sq um V Vth--V mA/mm GHz mS/mm V dB Vp--V mA/mm mS/mm V dB Vp--V mA/mm mA/mm mS/mm V Parameter Metal Layers Values NiCr Bulk Value Four: 0.5,2,2,5 1200 50 700 0.6 0.55 +0.15 90 18 225 22 0.90 -0.6 70 200 18.5 0.54 -2.2 270 365 170 19 Yes Gate Length N+ Diode E-FET; (All FETs) Vforward Threshold Voltage Imax Ft @ Idss Gm Breakdown, Vgd Fmin, 6 GHz D-FET Pinchoff Voltage Idss Gm Breakdown, Vgd Fmin, 6 GHz G-FET Pinchoff Voltage Idss Imax Gm Breakdown, Vgd Vias Mask Layers No Vias With Vias 18 20 -55 to +150 - Design - Typical 10 20 C V V Maximum Ratings FET Operating Channel Temp Capacitor Breakdown Voltage Specifications Subject to Change TriQuint Semiconductor TriQuint Semiconductor 2300 NE Brookwood Pkwy 2300 NE Brookwood Pkwy Hillsboro, Oregon 97124 Hillsboro, Oregon 97124 Semiconductors for Communications www.triquint.com Page 2 of 7; Rev 1.0 11/15/01 Page 2 of 6; Rev 2.1 8/10/02 Phone: 503-615-9000 Phone: 503-615-9000 Fax: 503-615-8905 Fax: 503-615-8905 Email: info@triquint.com Email: info@triquint.com Production Process Advanced Passives & MESFET Foundry Service GFET 300 um Vds=3V 50% Idss -4 -3 -2 -1 0 1 2 3 4 TQTRp S11 S22 Freq (0.1GHz to 26.1GHz) S12 / .05 S21 DFET 300 um Vds=3V 50% Idss -4 -3 -2 -1 0 1 2 3 4 S11 S22 Freq (0.1GHz to 26.1GHz) S12 / .05 S21 EFET 300 um Vds=3V 50% Idmax -6 -4 -2 0 2 4 6 S11 S22 Freq (0.1GHz to 26.1GHz) S12 / .05 S21 TriQuint Semiconductor 2300 NE Brookwood Pkwy Hillsboro, Oregon 97124 Semiconductors for Communications www.triquint.com Page 3 of 6; Rev 2.1 8/10/02 Phone: 503-615-9000 Fax: 503-615-8905 Email: info@triquint.com Production Process Advanced Passives & MESFET Foundry Service Gmax vs Vgs vs Frequency 300 um FETs; Three Types Vds = 1.5 & 3.0 V; T=27C E FE T Gmax v s V gs v s Freq. 24.0 Gmax (dB) 20.0 16.0 12.0 8.0 4.0 0. 6 0. 4 0. 2 0. 5 0. 3 V ds = 1.5V @ 1.1GH z V ds + 1.5V @ 2.2GH z V ds + 1.5V @ 5.8GH z V ds = 1.5V @ 7.9GH z V ds = 1.5V @ 12.1GH z V ds = 3.0V @ 1.1GH z V ds = 3.0V @ 2.2GH z V ds = 3.0V @ 5.8GH z V ds = 3.0V @ 7.9GH z V ds = 3.0V @ 12.1GH z TQTRp Ft versus Vgs; 300 um FETs; Three Types; Vds = 1.5 & 3.0 V; T=27C EFET Ft vs Vgs 20.00 Ft (GHz) 15.00 10.00 5.00 0.00 20 0. 30 0. 40 0. 50 0. 60 0. Vds = 1.5V Vds = 3.0V Vgs (V) Vgs (V) DFET Gmax vs Vgs vs Freq 26.0 Gmax (dB) 22.0 18.0 14.0 10.0 6.0 -0 .4 -0 .2 0. 0 0. 2 0. 4 Vgs (V) Vds = 1.5V @ 1.1GH z Vds = 1.5V @ 2.2GH z Vds = 1.5V @ 5.8GH z Vds = 1.5V @ 7.9GH z Vds = 1.5V @ 12.1GHz Vds = 3.0V @ 1.1GH z Vds = 3.0V @ 2.2Ghz Vds = 3.0V @ 5.8GH z Vds = 3.0V @ 7.9GH z Vds = 3.0V @ 12.1GHz DFET Ft vs Vgs 25.0 22.0 19.0 16.0 13.0 10.0 -0 .4 0 -0 .2 0 0. 40 0. 20 0. 00 Ft (GHz) Vds = 1.5V Vds = 3.0V Vgs (V) G F ET G m ax v s V g s v s F req 2 6 .0 2 2 .0 Gmax (dB) 1 8 .0 1 4 .0 1 0 .0 6 .0 -1.6 -1.4 -1.2 -1.0 -0.8 -0.6 -0.4 -0.2 0.0 0.2 Vg s (V) V d s = 1.5 V @ 1.1 GH z V d s = 1.5 V @ 2.2 GH z V d s = 1.5 V @ 5.8 GH z V d s = 1.5 V @ 7.9 GH z V d s = 1.5 V @ 12 .1G H z V d s = 3.0 V @ 1.1 GH z V d s = 3.0 V @ 2.2 GH z V d s = 3.0 V @ 5.8 GH z V d s = 3.0 V @ 7.9 GH z V d s = 3.0 V @ 12 .1G H z GFET Ft vs Vgs 25.0 Ft (GHz) 23.0 21.0 19.0 17.0 15.0 -1 . -1 . -1 . -1 . -0 . -0 . -0 . -0 . 0. 00 0. 20 00 60 60 20 40 80 40 20 Vds = 1.5V Vds = 3.0V Vgs (V) TriQuint Semiconductor 2300 NE Brookwood Pkwy Hillsboro, Oregon 97124 Semiconductors for Communications www.triquint.com Page 4 of 6; Rev 2.1 8/10/02 Phone: 503-615-9000 Fax: 503-615-8905 Email: info@triquint.com Production Process Advanced Passives & MESFET Foundry Service EFET IV Curves 300 um TQTRp DFET IV Curves 300 um GFET IV Curves 300 um TriQuint Semiconductor 2300 NE Brookwood Pkwy Hillsboro, Oregon 97124 Semiconductors for Communications www.triquint.com Page 5 of 6; Rev 2.1 8/10/02 Phone: 503-615-9000 Fax: 503-615-8905 Email: info@triquint.com Production Process Advanced Passives & MESFET Foundry Service Prototyping and Development * Prototype Development Quickturn (PDQ): * Shared Mask Set; * Run Monthly; * Hot Lot Cycle; * Via and Non-Via Options. Prototype Wafer Option (PWO): * Customer-specific Masks, Customer Schedule * 2 wafers delivered * Hot Lot Cycle Time * With thinning and sawing; optional backside vias Design Sensitivity Test (DST) Wafer Run * Yield Analysis * Design Sensitivity to Process Variation * 14 Wafer Start; Spread of Vp Values * * TQTRp Process Qualification Status TQTRp is a fully released qualified process Reliability Reports * TQTRp Process Qualification * TQTRX Element Qualification Report (for FETs) For more information on Quality and Reliability, contact TriQuint or visit www.tqs.com/Manufacturing/QR/bdy_qr-pubs.htm. * * * Applications Support Services * * * * Tiling of GDSII Stream Files including PCM on 15 x 15 mm maximum Tile Size Design Rule Check Services Layout versus Schematic Check Services Engineering Services: * Packaging Development * On-Wafer Test Development * Packaged Parts * Thermal Analysis * Yield Enhancement Part Qualification Services Failure Analysis Design Tool Status * * * * * * * Design Manual Available Now Device Library of Circuit Elements: FETs, Diodes, Thin Film and Implanted Resistors, Capacitors, Inductors Parameters for "TriQuint's Own Model" (TOM) Agilent ADS Design Kit Available Now PSPICE Models Available Q2'02 Cadence Layout Library Available Now Layout/Verification Kit for ICEditors in Q4'02 * * Manufacturing Services * * * * * * * * * Mask Making Production 150 mm Wafer Fab Wafer Thinning Wafer Sawing Substrate Vias DC Die Sort Testing RF On-Wafer Testing Plastic Packaging RF Packaged Part Testing * * GaAs Design Classes: * Half Day Introduction; Upon Request * Four Day Technical Training; Fall & Spring at TriQuint Oregon facility For Training Schedules please visit: www.triquint.com/foundry Training Please contact your local TriQuint Semiconductor Representative or Foundry Services Staff for additional information: E-mail: sales@triquint.com Phone: (503) 615-9000 Fax: (503) 615-8905 TriQuint Semiconductor 2300 NE Brookwood Pkwy Hillsboro, Oregon 97124 Semiconductors for Communications www.triquint.com Page 6 of 6; Rev 2.1 8/10/02 Phone: 503-615-9000 Fax: 503-615-8905 Email: info@triquint.com |
Price & Availability of TQTRX
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